The planar structure of thin-film piezoelectric resonators limits the integration of multiband processors on a single chip. A three-dimensional nanomechanical resonator based on conformal ferroelectric gates to excite resonance in scalable silicon fins is shown to enable multiband integration on a single chip and to facilitate densification of processors for ultrawide-band wireless communication.
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References
Ruby, R. A snapshot in time: the future in filters for cell phones. IEEE Microw. Mag. 16, 46–59 (2015). This paper presents an overview of planar acoustic filters and their limitations.
Ghatge, M. et al. An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide. Nat. Electron. 2, 506–512 (2019). This paper introduces the atomic-layered ferroelectric hafnium zirconium oxide transducer.
Tharpe, T. et al. Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices. Nat. Electron. 6, 599–609 (2023). This paper presents the application of a ferroelectric hafnium zirconium oxide transducer to create intrinsically switchable gigahertz nanomechanical resonators.
Hodjat-Shamami, M. & Ayazi, F. Eigenmode operation of piezoelectric resonant gyroscopes. Microsyst. Nanoeng. 6, 108 (2020). This paper reports challenges with designing planar piezoelectric micro-electromechanical system (MEMS) gyroscopes.
Ramkaj, A. T. et al. in Multi-Gigahertz Nyquist Analog-to-Digital Converters: Architecture and Circuit Innovations in Deep-Scaled CMOS and FinFET Technologies 217–246 (Springer, 2022). This book chapter reviews advances in ADCs for direct radio-frequency conversion at gigahertz bandwidth.
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This is a summary of: Hakim, F. et al. A ferroelectric-gate fin microwave acoustic spectral processor. Nat. Electron. https://doi.org/10.1038/s41928-023-01109-5 (2024).
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Three-dimensional acoustic resonators for massively scalable spectral processors. Nat Electron 7, 100–101 (2024). https://doi.org/10.1038/s41928-023-01110-y
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DOI: https://doi.org/10.1038/s41928-023-01110-y