Conventional dielectric layers used in stretchable electronics are solution-processed, thick and have poor electrical performance compared with rigid, inorganic dielectrics. A stretchable nanometre-thick gate dielectric layer has been produced using large-area vacuum deposition. This material has excellent electrical, mechanical and chemical properties and could facilitate the development of high-performance wearable devices.
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References
Wang, S. et al. Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature 555, 83–88 (2018). This paper reports the scalable fabrication of intrinsically stretchable transistors.
Song, J.-K. et al. Stretchable colour-sensitive quantum dot nanocomposites for shape-tunable multiplexed phototransistor arrays. Nat. Nanotechnol. 17, 849–856 (2022). This paper reports a high-performance intrinsically stretchable photonic material for shape-tunable phototransistor arrays.
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This is a summary of: Koo, J. H. et al. A vacuum-deposited polymer dielectric for wafer-scale stretchable electronics. Nat. Electron. https://doi.org/10.1038/s41928-023-00918-y (2023).
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A stretchable nanoscale dielectric for large-area wearable electronics. Nat Electron 6, 107–108 (2023). https://doi.org/10.1038/s41928-023-00919-x
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DOI: https://doi.org/10.1038/s41928-023-00919-x