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Two-dimensional materials

Hybrid dielectrics for two-dimensional electronics

Nature Materials volume 22, pages 1059–1060 (2023)Cite this article

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Using the van der Waals crystal Sb2O3 as a buffer layer enables the growth of high-κ dielectrics on two-dimensional materials via atomic layer deposition.

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Fig. 1: Schematic illustration of the hybrid HfO2/Sb2O3 dielectric growth on MoS2.

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Authors and Affiliations

  1. Key Laboratory for the Physics and Chemistry of Nanodevices, School of Electronics, Peking University, Beijing, China

    Yang Liu

  2. Department of Mechanical Engineering, Columbia University, New York, NY, USA

    James C. Hone

Authors
  1. Yang Liu
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  2. James C. Hone
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Correspondence to Yang Liu or James C. Hone.

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The authors declare no competing interests.

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Liu, Y., Hone, J.C. Hybrid dielectrics for two-dimensional electronics. Nat. Mater. 22, 1059–1060 (2023). https://doi.org/10.1038/s41563-023-01642-w

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