Ion Implantation, Sputtering and Their Applications.
By P. D. Townsend, J. C. Kelly and N. E. W. Hartley. Pp. ix+333. (Academic: London and New York, June 1976.) £13; $32.25.
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Dearnaley, G. Energetic ion beams and sputtering. Nature 264, 385 (1976). https://doi.org/10.1038/264385b0
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DOI: https://doi.org/10.1038/264385b0