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Selected papers on Wave-based MEMS devices in 2023
There is a wave everywhere, they are used to achieve many novel applications. According to the characteristics of the wave, they are divided into three subjects which including optical, RF and nano-scale imaging. MEMS-based optical device promotes the miniaturization and high efficiency of applications, for example, solar cells and radars, so it has been a hotspot for a long time. MEMS-based RF device plays a important role in 5G and even 6G, so a lot of studies still needed to be done. What' more, nano-scale imaging shows the possible of wave-based imaging technique.