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A new resolution quest in electron microscopy

Since its development over 20 years ago, aberration correction has revolutionized the way we study materials at the atomic scale. Here, I outline a set of technical developments for electron microscopes that, when implemented and combined, will enable us to better understand how matter behaves.

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References

  1. Feynmnan, R.P. The Pleasure of Finding Things Out: The Best Short Works of Richard P. Feynman 117–141 (Helix Books, 1999).

  2. Scherzer, O. Sphärische und chromatische Korrektur von Elektronenlinsen. Optik 2, 114–132 (1947).

    CAS  Google Scholar 

  3. Zach, J. & Haider, M. Correction of spherical and chromatic aberration in a low-voltage SEM. Optik 99, 112–118 (1995).

    Google Scholar 

  4. Krivanek, O., Dellby, N., Spence, A.J., Camps, R.A. & Brown, L.M. in Proceedings of EMAG (ed. Rodenburg, J.M.) 35–39 (Institute of Physics, 1997).

  5. Morishita, S. et al. Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector. Microscopy 67, 46–50 (2018).

    Article  CAS  Google Scholar 

  6. Krivanek, O. L. et al. Vibrational spectroscopy in the electron microscope. Nature 514, 209–212 (2014).

    Article  CAS  Google Scholar 

  7. Tiemeijer, P.C. in Proceedings of EMAG, 191–194 (Institute of Physics, 1999).

  8. Shibata, N. et al. Atomic resolution electron microscopy in a magnetic field free environment. Nat. Commun. 10, 2308 (2019).

    Article  CAS  Google Scholar 

  9. Dellby, N. et al. Ultra-High Energy Resolution EELS. Micros. Microanal. 26, 1804–1805 (2020).

    Article  Google Scholar 

  10. Griillo, V. et al. Measuring the orbital angular momentum spectrum of an electron beam. Nat. Commun. 8, 15536 (2017).

    Article  Google Scholar 

Download references

Acknowledgements

The author acknowledges support from the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. The author would also like to thank to O. L. Krivanek, N. Dellby, J. Rusz, S. J. Pennycook, A. Konečná, R. F. Klie, R. E. Dunin-Borkowski, N. Shibata, R. Ishikawa and A. R. Lupini for the countless stimulating discussions and emails through many years about some of the topics covered in this essay.

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Correspondence to Juan Carlos Idrobo.

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Idrobo, J.C. A new resolution quest in electron microscopy. Nat Rev Mater 6, 100–102 (2021). https://doi.org/10.1038/s41578-020-00275-8

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