The push for smaller microelectronics poses many challenges, such as locating dopant atoms in semiconductors with ever-increasing precision. The ideal technique must be able to detect single dopants with atomic resolution, and identify their electronic state. Neither is an easy task.
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X-ray absorption near edge spectroscopy with a superconducting detector for nitrogen dopants in SiC
Scientific Reports Open Access 14 November 2012
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References
Semiconductor Industry Association; http://www.semichips.org/
Muller, D.A. et al. Nature 399, 758–761 (1999).
Wallace, R.M. & Wilk, G.D. Mater. Res. Soc. Bull. 27, 186–191 (2002).
Perovic, D.D. et al. Ultramicroscopy 58, 104–113 (1995).
Castell, M.R., Simpson, T.W., Mitchell, I.V., Perovic, D.D. & Baribeau, J.M. Appl. Phys. Lett. 74, 2304–2306 (1999).
Sealy, C.P., Castell, M.R. & Wilshaw, P.R. J. Electron. Microsc. 49, 311–321 (2000).
Gribelyuk, M.A. et al. Phys. Rev. Lett. 89, 025502 (2002).
Rau, W.D., Schwander, P., Baumann, F.H., Höppner, W. & Ourmazd, A. Phys. Rev. Lett. 82, 2614–2617 (1999).
Twitchett, A.C., Dunin-Borkowski, R.E. & Midgley, P.A. Phys. Rev. Lett. 88, 238–302 (2002).
Ebert, P. Appl. Phys. A 75, 101–112 (2002).
Crewe, A.V., Wall, J. & Langmore, J. Science 168, 1338–1340 (1970).
Voyles, P.M., Muller, D.A., Grazul, J.L., Citrin, P.H. & Gossmann, H.-J.L. Nature 416, 826–829 (2002).
Hillyard, S.E. & Silcox, J. Ultramicroscopy 58, 6–17 (1995).
Kaiser, U., Muller, D.A., Grazul, J., Chuvulin, A. & Kawasaki, M. Nature Mater. 1, 102–105 (2002).
Vanfleet, R.R., Robertson, M., McKay, M. & Silcox, J. in Characterization and Metrology for ULSI Technology: 1998 International Conference (Seiler, D.G. et al. eds) 901–905 (American Institute of Physics, 1998).
Batson, P.E., Delby, N. & Krivanek, O.L. Nature 418, 618–620 (2002).
Cerezo, A., Larson, D.J. & Smith, G.D.W. Mater. Res. Soc. Bull. 26, 102–107 (2001).
Domke, C., Ebert, P., Heinrich, M. & Urban, K. Phys. Rev. B 54, 10288–10291 (1996).
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Castell, M., Muller, D. & Voyles, P. Dopant mapping for the nanotechnology age. Nature Mater 2, 129–131 (2003). https://doi.org/10.1038/nmat840
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DOI: https://doi.org/10.1038/nmat840
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