Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • Letter
  • Published:

Small Angle Filtered Electron Diffraction from Growing Films

Abstract

WE have developed a method for studying the structure of thin films during the earliest stages of growth. The method is based on small angle electron diffraction1–3 and is more sensitive than in situ electron microscopy.

This is a preview of subscription content, access via your institution

Access options

Buy this article

Prices may be subject to local taxes which are calculated during checkout

Similar content being viewed by others

References

  1. Mahl, H. von, and Weitsch, W. Z., Naturforsch, 15A, 1051 (1960).

    Article  ADS  Google Scholar 

  2. Wade, R. H., and Silcox, J., App. Phys. Lett., 8, 7 (1966).

    Article  ADS  CAS  Google Scholar 

  3. Denbigh, P. N., and Dove, D. B., J. App. Phys., 38, 99 (1967).

    Article  ADS  CAS  Google Scholar 

  4. Grigson, C. W. B., and Dove, D. B., J. Vac. Sci. Tech., 3, 120 (1966).

    Article  ADS  Google Scholar 

  5. Poppa, H., J. Vac. Sci. Tech., 2, 42 (1965).

    Article  ADS  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

TOMPSETT, M., HERITAGE, M. & GRIGSON, C. Small Angle Filtered Electron Diffraction from Growing Films. Nature 215, 498–499 (1967). https://doi.org/10.1038/215498a0

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1038/215498a0

This article is cited by

Comments

By submitting a comment you agree to abide by our Terms and Community Guidelines. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate.

Search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing